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Superman Returns Pc Game Torent Tpb Hit ausland autoroutenpl is the first movie of the celebrated Super-man series which was released in 2006. This game can offer you a.. Superman Returns Pc Game Torent Tpb Hit ausland autoroutenpl is the first movie of the celebrated Super-man series which was released in 2006. This game can offer you a.
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is is ready and has already started downloading,and will continue downloading for a few minutes.In the field of semiconductor, the depth of focus of a lens of an optical exposure system is smaller than the minimum line width, and thus, it is difficult to transfer a fine pattern of the order of 2.mu.m or less, by using the system. For this reason, there is known a phase shifting technique in which, in the optical exposure apparatus, the mask pattern is divided into a plurality of regions (hereinafter, called “block areas”) each having a predetermined size, and the phase of light to be irradiated to each block area is changed, thereby causing a pattern with a deep depth of focus to be formed on the photosensitive substrate. In a conventional phase shifting technique in which the phase of light to be irradiated to each block area is changed, as shown in FIG. 1A, a blank mask 2 has openings 2a and 2b which are arranged in a pattern corresponding to a pattern of the mask 1 to be produced. A phase shifting mask 1 is provided with the blank mask 2 attached to the mask 1. In the opening 2a, the phase of light to be irradiated to the respective block areas of the mask 1 is shifted by 180.degree. relative to that of the opening 2b, and the phase of the light transmitted through the opening 2a of the blank mask 2 is made the same as that of the light transmitted through the opening 2b of the blank mask 2. The mask 1 is subjected to exposure, and the mask 1 is detached from the blank mask 2, so that a mask pattern of two openings is formed on the mask 1. This pattern is divided into a plurality of block areas. Next, as shown in FIG. 1B, the phase of light to be irradiated to each of the block areas is shifted by 180.degree. relative to that of the pattern shown in FIG. 1A. The pattern to be transferred is formed by phase shifting. In such a phase shifting technique, there arises a problem that, since the mask 1 has a blank area on which a portion corresponding to the phase shifting region is formed, the exposure field is narrowed, and it is difficult to transfer a fine pattern. There is known another conventional technique of making a mask pattern of two openings for phase shifting. This technique is disclosed in Japanese Patent Laid-Open No. 168480/1991. This technique will be described below. As
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